| Ultra-high aspect ratio, high resolution nanofabrication for x-ray diffractive optics | |
| Abstract ID | 36 |
| Presenter | Chieh Chang |
| Presentation Type | Poster |
| Full Author List | Chieh Chang, Anne Sakdinawat |
| Affiliations | SLAC |
| Category | |
| Abstract | A new method for producing ultra-high aspect ratio, high resolution nanostructures for x-ray diffractive optics is presented. This method, based on metal-assisted chemical etching, is capable of producing structures with greater than 1:100 aspect ratios, high resolution, smooth sidewalls, large areas, and arbitrary patterning. This provides a pathway for producing very high efficiency diffractive optics for energies ranging from EUV to hard x-rays. |
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| Funding Acknowledgement | |